Design and fabrication of an innovative three-axis Hall sensor-Reference-Cited by-同舟云学术

Design and fabrication of an innovative three-axis Hall sensor

Published:2016-01 Issue: Volume:237 Page:62-71
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wouters C.,Vranković V.,Rössler C.,Sidorov S.,Ensslin K.,Wegscheider W.,Hierold C.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Three-axis cryogenic Hall sensor;Kvitkovič;J. Magn. Magn. Mater.,1996

2. Single-chip 3-D silicon Hall sensor;Schott;Sens. Actuators A,2000

3. First fully CMOS-integrated 3D Hall probe;Kejik,2005

4. Integrated vector sensor and magnetic compass using a novel 3D Hall structure;Roumenin;Sens. Actuators A,2001

5. 3-D silicon vector sensor based on a novel parallel-field Hall microdevice;Roumenin;Sens. Actuators A,2004

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