A 21.5kHz high optical resolution electrostatic double-layered vibratory grating laser scanner-Reference-Cited by-同舟云学术

A 21.5kHz high optical resolution electrostatic double-layered vibratory grating laser scanner

Published:2011-08 Issue:2 Volume:168 Page:253-261
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Du Yu,Zhou Guangya,Cheo Kelvin K.L.,Zhang Qingxin,Feng Hanhua,Chau Fook Siong

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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