Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion-Reference-Cited by-同舟云学术

Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion

Published:2022-10 Issue: Volume:345 Page:113813
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Monsalve Jorge M.,Melnikov Anton,Stolz Michael,Mrosk Andreas,Jongmanns Marcel,Wall Franziska,Langa Sergiu,Marica-Bercu Ioana,Brändel Tim,Kircher Marco,Schenk Hermann A.G.,Kaiser Bert,Schenk Harald

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference39 articles.

1. Design and fabrication of wideband air-coupled capacitive micromachined ultrasonic transducers with varying width annular-ring and spiral cell structures;Adelegan;IEEE Trans. Ultrason., Ferroelectr., Freq. Control,2021

2. Bandwidth and sensitivity optimization in cmuts for airborne applications;Apte;2014 IEEE Int. Ultrason. Symp.,2014

3. Squeeze film air damping in MEMS;Bao;Sens. Actuators A: Phys.,2007

4. Acoustics;Beranek,1954

5. Advances in capacitive micromachined ultrasonic transducers;Brenner;Micromachines,2019

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Rapid characterisation of mixtures of hydrogen and natural gas by means of ultrasonic time-delay estimation;Journal of Sensors and Sensor Systems;2024-07-12

2. Design and Fabrication of Micro Resonator With Bilateral Concentric Boundaries;IEEE Sensors Letters;2024-07

3. Design of micromachines under uncertainty with the sample-average approximation method;Journal of Advanced Mechanical Design, Systems, and Manufacturing;2024