Nanometer scale active ground motion isolator-Reference-Cited by-同舟云学术

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Nanometer scale active ground motion isolator

Published:2013-12 Issue: Volume:204 Page:97-106
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Le Breton R.,Deleglise G.,Allibe J.,Badel A.,Balik G.,Caron B.,Jeremie A.,Lottin J.,Vilalte S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Investigation of micro-cutting operations;Chae;International Journal of Machine Tools and Manufacture,2006

2. Active vibration isolation of a large stroke scanning probe microscope by using discrete sliding mode control;Yen;Sensors and Actuators A: Physical,2005

3. New physics with the compact linear collider;Ellis;Nature,2001

4. The compact linear collider CLIC;Wilson;Physics Reports,2004

5. Towards CLIC feasibility;Delahaye,2010

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1. 多层压电驱动器在光刻机中的应用;Laser & Optoelectronics Progress;2022

2. Coil-free active stabilisation of extended payloads with optical inertial sensors;Measurement Science and Technology;2018-03-26

3. Vibration Control Using a Dedicated Inertial Sensor;IEEE Sensors Journal;2018-01-01

4. Budgeting and control of the mechanical noise in the International Linear Collider final focus system;Physical Review Special Topics - Accelerators and Beams;2014-06-11

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