Active vibration isolation of a large stroke scanning probe microscope by using discrete sliding mode control-Reference-Cited by-同舟云学术

Active vibration isolation of a large stroke scanning probe microscope by using discrete sliding mode control

Published:2005-05 Issue:1 Volume:121 Page:243-250
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Yen Jia-Yush,Lan Kuo-Jung,Kramar John A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference21 articles.

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