On the sensitivity improvement of CMOS capacitive accelerometer-Reference-Cited by-同舟云学术

On the sensitivity improvement of CMOS capacitive accelerometer

Published:2008-02 Issue:2 Volume:141 Page:347-352
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sun Chih-ming,Wang ChuanWei,Fang Weileun

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. S.J. Sherman, Monolithic accelerometer, U.S.A. Patent No. 5345824S, Analog Devices, Inc. September 13, 1994.

2. L.R. Carley, M.L. Reed, G.K. Fedder, Microelectromechanical structure and process of making same, U.S.A. Patent No. 5,717,631. Carnegie Mellon University, February 10, 1998.

3. A post-CMOS micromachined lateral accelerometer;Luo;IEEE/ASME J. MEMS,2002

4. Mechanical noise-limited CMOS-MEMS accelerometers;Tsai,2005

5. Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer;Xie,2003

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices;Engineering Research Express;2023-07-14

2. Microelectronic materials, microfabrication processes, micromechanical structural configuration based stiffness evaluation in MEMS: A review;Microelectronic Engineering;2022-07

3. CMOS-MEMS capacitive tactile sensor with vertically integrated sensing electrode array for sensitivity enhancement;Sensors and Actuators A: Physical;2021-01

4. Analysis of liquid-type proof mass under oscillating conditions;Micro and Nano Systems Letters;2020-07-22

5. Capacitive‐Type Two‐Axis Accelerometer with Liquid‐Type Proof Mass;Advanced Electronic Materials;2020-04-14