A simple numerical method to study the far-field diffraction of optical MEMS devices with a large array and complex element geometry-Reference-Cited by-同舟云学术

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A simple numerical method to study the far-field diffraction of optical MEMS devices with a large array and complex element geometry

Published:2010-03 Issue:1 Volume:158 Page:30-36
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Yu Yi-Ting,Yuan Wei-Zheng,Qiao Da-Yong,Yan Bin

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. Digital MEMS for optical switching;Dobbelaere;IEEE Commun. Mag.,2002

2. Deformable grating optical modulator;Solgaard;Opt. Lett.,1992

3. Challenges of a Digital Micromirror Device™: modeling and design;Knipe;Proc. SPIE,1996

4. A new microlens array fabrication method using UV proximity printing;Lin;J. Micromech. Microeng.,2003

5. Silicon grating-based mirror for 1.3-μm polarized beams: MATLAB-aided design;Hava;Appl. Opt.,1995

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. MEMS gratings and their applications;International Journal of Optomechatronics;2021-01-01

2. MEMS-based tunable gratings and their applications;SPIE Proceedings;2015-03-04

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