AFM thermal imaging as an optimization tool for a bulk micromachined thermopile-Reference-Cited by-同舟云学术

AFM thermal imaging as an optimization tool for a bulk micromachined thermopile

Published:2004-09 Issue:2-3 Volume:115 Page:440-446
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Fonseca L.,Pérez-Murano F.,Calaza C.,Rubio R.,Santander J.,Figueras E.,Gràcia I.,Cané C.,Moreno M.,Marco S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Scanning thermal microscopy;Majumdar;Annu. Rev. Matter Sci,1999

2. P.W. Kruse, Uncooled infra-red imaging arrays and systems, in: D.D. Skatrud (vol. Ed.), Semiconductors and Semimetals, vol. 47, Academic Press, 1997.

3. L. Fonseca, F. Pérez-Murano, C. Calaza, R. Rubio, J. Santander, E. Figueras, I. Gràcia, C. Cané, M. Moreno, S. Marco, Thermal AFM: A Thermopile Case Study, Ultramicroscopy, in press.

4. C. Calaza, M. Moreno, S. Marco, L. Fonseca, C. Cané, I. Gràcia, Design, fabrication and characterization of CMOS compatible thermoelectric IR sensors for a gas analysis application, IRS2, Erfurt, 2002.

5. Detection of gases with arrays of micromachined tin oxide gas sensors;Cané;Sens. Actuators B,2000

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