Dynamic simulation of a resonant MEMS magnetometer in Simulink®-Reference-Cited by-同舟云学术

Dynamic simulation of a resonant MEMS magnetometer in Simulink®

Published:2004-09 Issue:2-3 Volume:115 Page:392-400
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Izham Zaki,Ward Michael C.L.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

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4. Evaluation of MEMS materials of construction for implantable medical devices;Kotzar;Biomaterials,2002

5. S.F. Bart, CAD for integrated surface-micromachined sensors: present and future, ACM/SIGDA Physical Design Workshop, 1996, Reston VA.

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