Author:
Homentcovschi D.,Miles R.N.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. Finite-element modelling and characterization of a silicon condenser microphone with a highly perforated backplate;Bergquist;Sens. Actuators A,1993
2. M.J. Novack, Design and fabrication of thin film micromachined accelerometer, M.S. Thesis, Massachusetts Institute of Technology, 1992.
3. Micromechanical electrostatic K-band switches;Pacheco,1998
4. Air damping in resonant micromechanical capacitive sensors;Mattila,2000
5. Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking;Wu;IEEE Photon. Technol. Lett.,1996
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