Computationally efficient model for viscous damping in perforated MEMS structures-Reference-Cited by-同舟云学术

Computationally efficient model for viscous damping in perforated MEMS structures

Published:2020-10 Issue: Volume:314 Page:112201
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Kaczynski Jaroslaw^ORCID,Ranacher Christian,Fleury Clement

Funder

Electronic Component Systems for European Leadership Joint Undertaking (ECSEL JU) Program

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Analytic damping model for an MEM perforation cell;Veijola;Microfluid. Nanofluidics,2006

2. Analytic model for perforated squeezed-film dampers;Veijola;TIMA Editions,2006

3. Physikalisch basierte mixed-level Modellierung von gedämpften elektromechanischen Mikrosystemen;Sattler;Technical University of Munich,2007

4. Nonlinear effects in squeeze-film gas damping on microbeams;Chigullapalli;J. Micromech. Microeng.,2012

5. Viscous Fluid Flow;White,2006

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The Effect of Compliant Backplate on Capacitive MEMS Microphones;IEEE Sensors Journal;2024-06-01

2. Nanoscale and microscale processing—Modeling;Reference Module in Materials Science and Materials Engineering;2023

3. Analytical approach for damping model;Asian Journal of Civil Engineering;2022-08-20

4. A Collection of Large-Scale Benchmark Models for Nonlinear Model Order Reduction;Archives of Computational Methods in Engineering;2022-07-16

5. Study on the Dynamic Characteristics of a SiC-Based Capacitive Micro-Accelerometer in Rarefied Air;Materials;2022-07-04