Radical-enhanced atomic layer deposition of Y2O3 via a β-diketonate precursor and O radicals
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
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3. Exploration of the crystal structures and electronic features of Y2O3:Er and Y2O3:Er,Yb crystals: a first-principles study;Journal of Physics D: Applied Physics;2023-08-22
4. Ultrahigh Vacuum Annealing of Atomic-Layer-Deposited Y2O3/GaAs in Perfecting Heterostructural Chemical Bonding for Effective Passivation;ACS Applied Electronic Materials;2023-07-13
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