Low-energy electron-induced reactions in condensed HMDSO
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference12 articles.
1. Energy-selective reaction of the hydrogen-passivated Si surface with carbon tetrafluoride via dissociative electron attachment
2. Anion yields produced by low-energy electron impact on condensed hydrocarbon films
3. Oxygen diluted hexamethyldisiloxane plasmas investigated by means ofin situinfrared absorption spectroscopy and mass spectrometry
4. Infrared and Raman Studies on Films of Organosiloxane Networks Produced by PECVD
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3. Radiation Chemistry: Surface Science Techniques;Encyclopedia of Surface and Colloid Science, Third Edition;2015-12-04
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