Amorphous As–S–Se semiconductor resists for holography and lithography
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Holographic optical element fabrication using chalcogenide layers
2. Novel effects in inorganic As[sub 50]Se[sub 50] photoresists and their application in micro-optics
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4. Optically Formed Dielectric Gratings in Thick Films of Arsenic–Sulfur Glass
5. Effect of structure relaxation on the holographic recording in amorphous As2S3 films
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