Infrared and photoelectron spectroscopy of semi-insulating silicon layers
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. Semi-Insulating Polysilicon (SIPOS) deposition in a low pressure CVD reactor
2. Variation of semiconductor properties through the SiOx region of Si SiO2 interfaces
3. Evidence of two-phase structure in amorphous silicon oxides produced by N2O+SiH4 glow-discharge decomposition
4. Effects of the nearest neighbors and the alloy matrix on SiH stretching vibrations in the amorphousSiOr:H (0
5. Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering
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