Silicon nitride films deposited by Hg-photosensitization chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. Depositing Silicon Nitride Layers at Low Temperature Using a Photochemical Reaction
2. Structural and Electrical Properies of Photo-CVD Silicon Nitride Film
3. Characterization of Plasma Silicon Nitride Layers
4. Photo-Chemical Vapor Deposition of Silicon Nitride Film by Direct Photolysis
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