Deposition velocity of particles in charge equilibrium onto a flat plate in parallel airflow under the influence of simultaneous electrophoresis and thermophoresis
Author:
Publisher
Elsevier BV
Subject
Pollution,Atmospheric Science,Fluid Flow and Transfer Processes,Mechanical Engineering,Environmental Engineering
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4. Effect of a Trap Zone in Reducing Nanoparticle Contamination of Wafers and Photomasks in Parallel Airflowp;IEEE Transactions on Semiconductor Manufacturing;2018-02
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