Measurements and Control of Particle Deposition Velocity on a Horizontal Wafer with Thermophoretic Effect

Author:

Bae Gwi-Nam,Lee Chun Sik,Park Seung O.

Publisher

Informa UK Limited

Subject

Pollution,General Materials Science,Environmental Chemistry

Reference17 articles.

1. Measurement of Particle Deposition Velocity Toward a Horizontal Semiconductor Wafer by Using a Wafer Surface Scanner

2. Thermophoretic deposition of particles in gas flowing over cold surfaces

3. Donovan , R. P. , Yamamoto , T. , Clayton , A. C. , and Ensor , D. S. ( 1988 ). InProceedings of the 9th Meeting, Los Angeles, CA, September 26–30, International Confederation of Contamination Control Societies , pp. 37 – 42 .

4. Emi , H. , Otani , Y. , Kanaoka , C. , Kato , K. ( 1989 ). InProceedings of the 35th Annual Technical Meeting Anaheim, CA, May 1–5, Institute of Environmental Sciences , pp. 301 – 305 .

5. Diffusive leakage of small particles across the dust-free layer near a hot wall

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