Nanoparticle gas phase electrodeposition: Fundamentals, fluid dynamics, and deposition kinetics-Reference-Cited by-同舟云学术

Nanoparticle gas phase electrodeposition: Fundamentals, fluid dynamics, and deposition kinetics

Published:2021-01 Issue: Volume:151 Page:105652
ISSN:0021-8502
Container-title:Journal of Aerosol Science
language:en
Short-container-title:Journal of Aerosol Science

Author:

Schlag Leslie,Isaac Nishchay A.^ORCID,Nahrstedt Helene,Reiprich Johannes,Ispas Adriana^ORCID,Stauden Thomas^ORCID,Pezoldt Jörg,Bund Andreas^ORCID,Jacobs Heiko O.^ORCID

Funder

Deutsche Forschungsgemeinschaft

Publisher

Elsevier BV

Subject

Pollution,Atmospheric Science,Fluid Flow and Transfer Processes,Mechanical Engineering,Environmental Engineering

Reference53 articles.

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1. Ruthenium and Rhodium Vertical Interconnect Formation Using Gas Phase Electrodeposition;2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM);2023-05

2. Self‐Aligning Metallic Vertical Interconnect Access Formation through Microlensing Gas Phase Electrodeposition controlling Airgap and Morphology;Advanced Electronic Materials;2022-10-17