Numerical analysis on flow field and particle deposition on a heated spinning disk
Author:
Publisher
Elsevier BV
Subject
Pollution,Atmospheric Science,Fluid Flow and Transfer Processes,Mechanical Engineering,Environmental Engineering
Reference20 articles.
1. Particle deposition velocities on a spinning wafer;Ahn,1996
2. Thermophoretic deposition of particles in gas flowing over cold surfaces;Batchelor;Journal of Colloid and Interface Science,1985
3. Design and verification of nearly ideal flow and heat transfer in a spinning disk chemical vapor deposition reactor;Breiland;Journal of the Electrochemical Society,1991
4. Dynamical systems approach to particle transport modeling in dilute gas-particle flows with application to a chemical vapor deposition reactor;Burns;Aerosol Science and Technology,1997
5. Numerical modeling of particle dynamics in a cylindrical chamber containing a rotating disk;Chein;Aerosol Science and Technology,2004
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1. Investigation of particulate contamination of heated wafers contained in a closed environment;Journal of Aerosol Science;2015-10
2. Local Behavior of Deposition Velocity onto a Flat Plate in Horizontal Airflow under the Influence of Thermophoresis;Aerosol Science and Technology;2015-08-26
3. Deposition velocity of particles in charge equilibrium onto a flat plate in parallel airflow under the influence of simultaneous electrophoresis and thermophoresis;Journal of Aerosol Science;2014-01
4. Gaussian diffusion sphere model to predict deposition velocity onto wafers in laminar parallel airflow considering thermophoresis;The European Physical Journal Plus;2012-11
5. Particle deposition on face-up flat plates in parallel airflow under the combined influences of thermophoresis and electrophoresis;Journal of the Korean Physical Society;2012-10
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