Fabrication of high-aspect-ratio microstructures using excimer laser-Reference-Cited by-同舟云学术

Fabrication of high-aspect-ratio microstructures using excimer laser

Published:2004-06 Issue:6 Volume:41 Page:827-847
ISSN:0143-8166
Container-title:Optics and Lasers in Engineering
language:en
Short-container-title:Optics and Lasers in Engineering

Author:

Tseng Ampere A.,Chen Ying-Tung,Ma Kung-Jeng

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference17 articles.

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3. Excimer laser;Endert;Opt Quantum Electron,1995

4. Laser micromachining technology for device manufacturing;Gu;Med Device Diagn Ind,1998

5. UV lasers: effects and applications in materials science;Duley,1996

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