Protocol for scalable top-down fabrication of InP nanopillars using a self-assembled random mask technique
Author:
Funder
Australian Renewable Energy Agency
Australian National Fabrication Facility
Publisher
Elsevier BV
Subject
General Immunology and Microbiology,General Biochemistry, Genetics and Molecular Biology,General Neuroscience
Reference5 articles.
1. Surface-tailored InP nanowires via self-assembled Au nanodots for efficient and stable photoelectrochemical hydrogen evolution;Narangari;Nano Lett.,2021
2. Improved photoelectrochemical performance of GaN nanopillar photoanodes;Narangari;Nanotechnology,2017
3. Large-scale monolithic fabrication of III–V vertical nanowires on a standard Si(100) microelectronic substrate;Lecestre;ACS Omega,2022
4. Adjustable metal particle grid formed through upward directed solid-state dewetting using silicon nanowires;Wallace;Nanoscale Adv.,2020
5. Comparative study of Cl2, Cl2∕O2, and Cl2∕N2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP;Carlström;J. Vac. Sci. Technol. B.,2008
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