Comparison of boron halide, decaborane and B implants in Si from Molecular Dynamics simulations-Reference-Cited by-同舟云学术

Comparison of boron halide, decaborane and B implants in Si from Molecular Dynamics simulations

Published:2003-04 Issue: Volume:202 Page:143-148
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Webb R.P.,Winston S.H.,Gwilliam R.M.,Sealy B.J.,Boudreault G.,Jeynes C.,Kirkby K.J.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference8 articles.

3. Atom and Ion Collisions in Solids;Smith,1997

5. The Stopping and Range of Ions in Solids;Ziegler,1985

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