Investigation of plasma immersion ion implanted niobium oxide and titanium nitride films by nanohardness measurement-Reference-Cited by-同舟云学术

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Investigation of plasma immersion ion implanted niobium oxide and titanium nitride films by nanohardness measurement

Published:1996-12 Issue:1-4 Volume:120 Page:282-285
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Königer A.,Ensinger W.,Hammerl C.,Höchbauer T.,Schrag G.,Hartmann J.,Thomae R.W.,Bender H.,Stritzker B.,Rauschenbach B.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference12 articles.

1. Sheath thickness and potential profiles of ion‐matrix sheaths for cylindrical and spherical electrodes

2. Plasma immersion ion implantation using plasmas generated by radio frequency techniques

3. Plasma immersion ion implantation of steels

4. Plasma immersion ion implantation for ULSI processing

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Radio frequency plasma treatments on titanium for enhancement of bioactivity;Acta Biomaterialia;2008-11

2. Corrosion behavior of Ti–6Al–4V alloy treated by plasma immersion ion implantation process;Surface and Coatings Technology;2007-08

3. Effects of the High-Temperature Plasma Immersion Ion-Implantation Treatment on Corrosion Behavior of Ti-6Al-4V;IEEE Transactions on Plasma Science;2006-08

4. Properties of titanium nitride fabricated on stainless steel by plasma-based ion implantation/deposition;Materials Science and Engineering: A;2000-04

5. Structural investigations of titanium nitride films formed by plasma immersion ion implantation;Surface and Coatings Technology;1998-05

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