Author:
Seki T.,Kaneko T.,Takeuchi D.,Aoki T.,Matsuo J.,Insepov Z.,Yamada I.
Subject
Instrumentation,Nuclear and High Energy Physics
Reference14 articles.
1. Proc. 1994 IEEE Int. Reliability Physics Symp.;Schuegraf,1994
2. Handbook of Ion Implantation Technology;Mack,1992
3. Surface modifications by gas cluster ion beams
4. Surface modification with gas cluster ion beams
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