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Surface modifications by gas cluster ion beams

Published:1995-12 Issue:1-4 Volume:106 Page:165-169
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Yamada I.,Matsuo J.,Insepov Z.,Akizuki M.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference10 articles.

1. Proc. 14th Symp. on Ion Sources and Ion-Assisted Technology;Yamada,1991

2. Proc. 13th Int. Conf. on Applications of Acclerators in Research and Industry;Matsuo,1995

3. Proc. 10th Int. Conf. on Ion Implantation Technology;Yamada,1995

4. Proc. 13th Int. Conf. on Applications of Accelerators in Research and Industry;Akizuki,1995

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