TiO2 coating fabrication using gas injection magnetron sputtering technique by independently controlling the gas and power pulses
Author:
Funder
Narodowe Centrum Nauki
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference42 articles.
1. 40 Years of Industrial Magnetron Sputtering in Europe;Seyfert;SVC Bull. Fall.,2015
2. Magnetron sputtering – Milestones of 30 years;Bräuer;Vac.,2010
3. Gas injection as a tool for plasma process control during coating deposition;Zdunek;Surf. Coat. Technol.,2013
4. Characterization of microstructural, mechanical and optical properties of TiO2 layers deposited by GIMS and PMS methods;Skowronski;Surf. Coat. Technol.,2015
5. Characterization of sp3 bond content of carbon films deposited by high power gas injection magnetron sputtering method by UV and VIS Raman spectroscopy;Zdunek;Spectrochim. Acta A.,2018
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1. Tailoring the structural and optical properties of fabricated TiO2 thin films by O2 duty cycle in reactive gas-timing magnetron sputtering;Vacuum;2023-08
2. The Amorphous Carbon Thin Films Synthesized by Gas Injection Magnetron Sputtering Technique in Various Gas Atmospheres;Coatings;2023-04-25
3. On the Control of Hot Nickel Target Magnetron Sputtering by Distribution of Power Pulses;Coatings;2022-07-19
4. Effect of sputtering power on microstructure and corrosion properties of TiO2 films deposited by reactive magnetron sputtering;Journal of Materials Research and Technology;2022-07
5. Design of thin DLC/TiO2 film interference coatings on glass screen protector using a neon–argon-based gas injection magnetron sputtering technique;Diamond and Related Materials;2022-03
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