Formation of ain by nitrogen molecule ion implantation
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference6 articles.
1. Characteristics of the metal insulator semiconductor structure:AlN/Si
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5. A.S.T.M., X-ray Powder Data File No. 8-262.
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4. Structural-phase changes in Al6061-T6 alloy during high-dose N2+implantation;Radiation Effects and Defects in Solids;2004-02
5. Radiation damage of materials due to high-energy ion irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-05
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