Diffusion and solubility of Au implanted into the AZ1350 photoresist-Reference-Cited by-同舟云学术

Diffusion and solubility of Au implanted into the AZ1350 photoresist

Published:2000-05 Issue: Volume:166-167 Page:615-620
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Soares M.R.F.,Kaschny J.R.A.,dos Santos J.H.R.,Amaral L.,Behar M.,Fink D.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference13 articles.

1. Diffusion of metals in polymers

2. Interdiffusion at the polyimide–Cu interface

3. Diffusion and self‐gettering of ion‐implanted copper in polyimide

4. Thermal processing of a copper‐poly(phenyl quinoxaline) interface: Diffusion of the metal in the polymer studied by high resolution electron‐energy‐loss spectroscopy

5. Diffusion of metals deposited on a polyimide film (Kapton) under and out of irradiation

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