Study of roughness in Ti0.4Al0.6N/Mo multilayer structures
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference19 articles.
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4. Ion Beam Analysis: A Century of Exploiting the Electronic and Nuclear Structure of the Atom for Materials Characterisation;Reviews of Accelerator Science and Technology;2011-01
5. Comparative depth-profiling analysis of nanometer-metal multilayers by ion-probing techniques;TrAC Trends in Analytical Chemistry;2009-04
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