Non-linear effect on radiation damage of silicon by cluster ion bombardment-Reference-Cited by-同舟云学术

Non-linear effect on radiation damage of silicon by cluster ion bombardment

Published:2002-05 Issue:1-4 Volume:190 Page:787-791
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Liu Jiarui,Wang Xuemei,Shao Lin,Lu Xinming,Chu Wei-Kan

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference14 articles.

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2. Advanced Metallization for Future ULSI;Yamada,1997

3. Proceedings of the Application of Accelerators in Research and Industry '96;Toyoda,1997

5. I. Yamada, Japan Science and Technology Corporation, Agency of Science and Technology (JST), Innovative Research Application Program, 1998–2000

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