Nonlinear effects in defect production by atomic and molecular ion implantation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4905175
Reference43 articles.
1. Ion Implantation for Semiconductor Doping and Materials Modification
2. Charge-state dependence of energy loss of MeV dimers inGaAs(100)
3. Damage production in silicon by MeV Si cluster irradiation
4. Enhanced secondary-ion emission under gold-cluster bombardment with energies from keV to MeV per atom
5. Experimental study of molecular and cluster effects in secondary electron emission
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