Plasma synthesis of hard materials with energetic ions-Reference-Cited by-同舟云学术

Plasma synthesis of hard materials with energetic ions

Published:1999-01 Issue:1-4 Volume:148 Page:12-16
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Monteiro Othon R

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference19 articles.

1. J.J. Cuomo, S.M. Rossnagel, H.R. Kaufman, Handbook of Ion Beam Processing Technology, Noyes Publications, Mill Road, 1989

2. E.S. Machlin, Materials Science in Microelectronics: The Relationships between Thin Film Processing and Structure, Giro Press, Croton-on-Hudson, 1995

3. Ion bombardment effects during deposition of nitride and metal films

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