Molecular-dynamics simulation of silicon film growth from cluster beams-Reference-Cited by-同舟云学术

Molecular-dynamics simulation of silicon film growth from cluster beams

Published:1998-06 Issue:1-2 Volume:142 Page:77-82
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Xie J.Q,Feng J.Y

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference17 articles.

1. T. Takagi, I. Yamada, M. Kunori, S. Kobiyama, Proc. 2nd Int. Conf. Ion Sources, Vienna, 1972, p. 790

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