Heavy ion (Xe and I) irradiation effects on photoresist films-Reference-Cited by-同舟云学术

Heavy ion (Xe and I) irradiation effects on photoresist films

Published:2002-05 Issue:1-4 Volume:191 Page:733-738
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Garcia Irene T.S.,Zawislak F.C.,Balzaretti Naira M.,Nastasi M.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference10 articles.

1. Thermal stability of He irradiated photoresist films

2. Ion Irradiation Induced Crosslinking Effects on Mechanical Properties of Photoresist Films

3. I.T.S. Garcia, Irradiação e implantação iônica em filmes fotossensı́veis compostos de poli(fenolformaldeı́do) e diazonaftoquinona, PGCIMAT-UFRGS, Ph.D. thesis, 2001

4. Mechanical properties of He irradiated and annealed AZ-1350 JTM films

5. Effects of electronic and recoil processes in polymers during ion implantation

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