Prevention of impurity gettering in the RP/2 region of ion-implanted silicon by defect engineering
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference18 articles.
1. Proximity gettering with mega‐electron‐volt carbon and oxygen implantations
2. Detection of Metastabile Defective Regions in Ion-Implanted Silicon by Means of Metal Gettering
3. Impurity gettering to secondary defects created by MeV ion implantation in silicon
4. Depth profiling of vacancy clusters in MeV-implanted Si using Au labeling
5. Spatial distribution of defects in ion-implanted and annealed Si: The RP/2 effect
Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. The effects of swift heavy-ion irradiation on helium-ion-implanted silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-10
2. Release of helium from vacancy defects in yttria-stabilized zirconia under irradiation;Physical Review B;2012-12-05
3. Dual beam irradiation of nanostructured FeCrAl oxide dispersion strengthened steel;Journal of Nuclear Materials;2011-05
4. Gettering layer for oxygen accumulation in the initial stage of SIMOX processing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-05
5. The role of implantation-induced point defects for the redistribution of oxygen in silicon at high-temperature processing;Journal of Applied Physics;2008-11-15
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3