Ultra shallow secondary ion mass spectrometry depth profiling: Limitation of sample rotation in improving depth resolution
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference20 articles.
1. Sources of error in quantitative depth profiling of shallow doping distributions by secondary-ion-mass spectrometry in combination with oxygen flooding
2. The complex formation of ripples during depth profiling of Si with low energy, grazing oxygen beams
3. Secondary ion yield changes in Si and GaAs due to topography changes during O+2 or Cs+ ion bombardment
4. Effect of surface roughening on secondary ion yields and erosion rates of silicon subject to oblique oxygen bombardment
5. Influence of the composition of the altered layer on the ripple formation
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Hydrogen retention and nitrogen distribution in delta-doped diamond films;Materials Today Communications;2018-12
2. Comparing depth profiling of oxide scale on SOFC interconnect-materials using ToF-SIMS with69Ga+, Bi3+/Cs+and C60+/C602+as primary and sputter ions;Materials at High Temperatures;2015-01
3. Investigation of metallic interdiffusion in Al x Ga1−x N/GaN/sapphire heterostructures used for microelectronic devices by SEM/EDX and SIMS depth profiling;Analytical and Bioanalytical Chemistry;2010-02-20
4. Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy Cs[sup +] secondary ion mass spectrometry;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2007
5. Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy O[sub 2]+] secondary-ion-mass spectrometry;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2006
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3