Intrinsic residual stresses in metal films synthesized by energetic particle deposition-Reference-Cited by-同舟云学术

Intrinsic residual stresses in metal films synthesized by energetic particle deposition

Published:2001-04 Issue: Volume:175-177 Page:688-693
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Misra A.,Nastasi M.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference11 articles.

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2. Stress-related effects in thin films

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4. Properties and microstructure of tungsten films deposited by ion-assisted evaporation

5. Stresses in thin films: The relevance of grain boundaries and impurities

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