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VUV and IR spectroellipsometric studies of polymer surfaces

  • Published:2003-08 Issue: Volume:208 Page:35-39
  • ISSN:0168-583X
  • Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  • language:en
  • Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Woollam John A.,Bungay Corey,Hilfiker James,Tiwald Tom

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference24 articles.

1. Ellipsometry and Polarized Light;Azzam,1977

2. Critical Reviews of Optical Science and Technology, Optical Metrology, CR72;Woollam,1999

3. Critical Reviews of Optical Science and Technology, Optical Metrology CR72;Johs,1999

4. Spectroscopic Ellipsometry and Reflectivity, “A User’s Guide”;Tompkins,1999

5. Automatic rotating element ellipsometers: Calibration, operation, and real‐time applications

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