Application of heavy-ion RBS to compositional analysis of thin films
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference6 articles.
1. Application of heavy ions to high depth resolution RBS
2. Three-dimensional microanalysis using a focused MeV oxygen ion beam
3. Heavy ion backscattering spectrometry for high sensitivity
4. RBS and ERD analysis using lithium ions
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4. Artificial neural network analysis of RBS data with roughness: Application to Ti0.4Al0.6N/Mo multilayers;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2003-10
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