Yields and energy distributions of sputtered semiconductor clusters

Author:

Heinrich R.,Wucher A.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 28 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. On the Sputtering of Copper Phthalocyanine Molecules on a GaAs Substrate under Bombardment with Multiply Charged Ions;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2021-03

2. Mass spectrometric investigation of material sputtered under swift heavy ion bombardment;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2018-11

3. Secondary ion formation during electronic and nuclear sputtering of germanium;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2018-06

4. Molecular ionization probability in cluster-SIMS;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2018-05

5. Secondary ion formation on indium under nuclear and electronic sputtering conditions;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2018-05

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