Adsorptive separation of high purity tetramethylsilane on zeolites from low-boiling residues of dimethyldichlorosilane synthesis-Reference-Cited by-同舟云学术

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Adsorptive separation of high purity tetramethylsilane on zeolites from low-boiling residues of dimethyldichlorosilane synthesis

Published:2020-11 Issue: Volume:254 Page:123522
ISSN:0254-0584
Container-title:Materials Chemistry and Physics
language:en
Short-container-title:Materials Chemistry and Physics

Author:

Chang Xin,Wan Ye,Zhao Xiong,Yuan Zhenjun,Zhao Xizhe,Li Yuanxiao,Guo Shuhu,Yan Dazhou

Funder

Research and Development Program for Scientific and Technological Talents of Henan Province

Leading Industrial Clusters in Zheng Luoxin’s National Independent Innovation Demonstration Zone

Publisher

Elsevier BV

Subject

Condensed Matter Physics,General Materials Science

Reference40 articles.

1. Comparison of various low dielectric constant materials;Cheng;Thin Solid Films,2018

2. Low dielectric constant materials for ULSI interconnects;Morgen;Annu. Rev. Mater. Sci.,2000

3. Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects-state of the art;Grill;Appl. Phys. Rev.,2014

4. Ultrathin pore-seal film by plasma enhanced chemical vapor deposition SiCH from tetramethylsilane;Furuya;J. Vac. Sci. Technol. B,2005

5. A study of trimethylsilane (3MS) and tetramethylsilane (4MS) based α-SiCN:H/α-SiCO:H diffusion barrier films;Chen;Materials,2012

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. In-situ encapsulated CeO2 and doped Al in meso-ZSM-5 for efficient catalytic combustion of o-dichlorobenzene;Applied Catalysis B: Environment and Energy;2024-12

2. Zirconium-based metal-organic framework for tetramethylsilane/isopentane separation;CHINESE J INORG CHEM;2023

3. Crucial role of alkali metal ions and Si/Al ratio in selective adsorption of 1-octene using faujasite zeolites;Separation and Purification Technology;2023-06

4. Redistribution mechanism on the preparation of dichlorodimethylsilane by the ZnCl2/MIL-53(Al) catalyst;Chemical Physics Letters;2022-02

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