Influence of hydrogen annealing on the properties of hafnium oxide thin films
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference60 articles.
1. Optical and microstructural properties of hafnium dioxide thin films
2. Chemical vapor deposition and characterization of HfO2 films from organo-hafnium compounds
3. Reactive evaporation of low-defect density hafnia
4. High-pressure reactively sputtered HfO2: Composition, morphology, and optical properties
5. Study of HfO2 thin films prepared by electron beam evaporation
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