Author:
Chung C.-M.,Chou T.P.,Cao G.,Kim J.-G.
Subject
Condensed Matter Physics,General Materials Science
Reference23 articles.
1. Control of Volatile Organic Compound Emissions;Hunter,2000
2. C. Six, M. Schneider, WO Patent 2003045656 (2003).
3. Y. Yuasa, S. Izumitani, K. Kagawa, T. Asada, K. Nakamura, I. Joko, T. Nakahara, JP Patent 9117780 (1997).
4. Real-time amine monitoring and its correlation to critical dimension control of chemically amplified resists for sub-0.25-μm geometries
5. Novel Approach for the Improvement of Post Exposure Delay Stability in ArF Resist Composed of Alicyclic Polymer.