Decomposition processes of H3NBH3 (borazane), (BH)3(NH)3 (borazine), and B(CH3)3 (trimethylboron) on heated W wire surfaces
Author:
Funder
JSPS KAKENHI
Publisher
Elsevier BV
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Reference15 articles.
1. Cat-doping: Novel method for phosphorus and boron shallow doping in crystalline silicon at 80 °C
2. Low temperature boron doping into crystalline silicon by boron-containing species generated in Cat-CVD apparatus
3. Production of B Atoms and BH Radicals from B2H6/He/H2 Mixtures Activated on Heated W Wires
4. Catalytic decomposition of phosphorus compounds to produce phosphorus atoms
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1. Physics and Chemistry of Cat-CVD;Catalytic Chemical Vapor Deposition;2019-02-15
2. Hot metal wires as sinks and sources of B atoms;Thin Solid Films;2017-08
3. Decomposition processes of photoresist polymers by H atoms produced on hot wire surfaces;Thin Solid Films;2017-08
4. A Clean Source of B atoms without Using Explosive Boron Compounds;Bulletin of the Chemical Society of Japan;2016-08-15
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