Production of B Atoms and BH Radicals from B2H6/He/H2 Mixtures Activated on Heated W Wires
Author:
Affiliation:
1. Japan Science and Technology Agency, CREST, Sanbancho, Chiyoda, Tokyo 102-0075, Japan
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp5046063
Reference42 articles.
1. Production of high‐quality amorphous silicon films by evaporative silane surface decomposition
2. Identification of Si and SiH in catalytic chemical vapor deposition of SiH4 by laser induced fluorescence spectroscopy
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