Acute and chronic toxicity to Daphnia magna of colloidal silica nanoparticles in a chemical mechanical planarization slurry after polishing a gallium arsenide wafer

Author:

Karimi Sarah,Troeung Meiline,Wang Ruhung,Draper Rockford,Pantano Paul,Crawford Steven,Aravamudhan Shyam

Funder

Semiconductor Research Corporation

National Science Foundation

Simon Karecki Foundation

The University of Texas

Dallas School of Natural Sciences & Mathematics

Publisher

Elsevier BV

Subject

Public Health, Environmental and Occupational Health,Safety Research,Safety, Risk, Reliability and Quality,Materials Science (miscellaneous)

Reference74 articles.

1. Daphnia magna as a test animal in acute and chronic toxicity tests;Adema;Hydrobiologia,1978

2. Guide E1193-97. Standard Guide for Conducting Daphnia magna Life-cycle Toxicity tests;American Society for Testing Materials (ASTM),2012

3. The number of pre-adult instars, growth, relative growth, and variation in Daphnia magna;Anderson;Biol. Bull.,1932

4. The toxicity thresholds of various substances found in industrial wastes as determined by the use of Daphnia magna;Anderson;Sew. Work. J.,1944

5. Current status of slurries and cleans for CMP of III-V device fabrications – a critical review;Banerjee;ECS Trans.,2014

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