Author:
Fürjes P.,Dücső Cs.,Ádám M.,Zettner J.,Bársony I.
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science
Reference5 articles.
1. A low-power integrated catalithic gas sensor;Krebs;Sensors and Actuators B,1993
2. Materials and processing for realisation of micro-hotplates operated at elevated temperature;Fürjes;Journal of Micromechanics and Microengineering,2002
3. Novel C-MOS compatible monolithic silicon gas-flow sensor with porous silicon thermal isolation;Kaltsas;Sensors and Actuators A,1999
4. Thermomechanical analysis of hotplates by FEM;Vı́zváry;Microelectronics Journal,2001
5. Lock-in IR-thermography—A novel tool for material and device characterization;Huth;Solid State Phenomenan,2002
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35 articles.
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