Author:
Vı́zváry Zs.,Fürjes P.,Bársony I.
Reference4 articles.
1. Cs. Dücső, É. Vázsonyi, M. Ádám, I. Bársony, J.G.E. Gardeniers, A. van den Berg, Porous silicon bulk micromachining for thermally isolated membrane formation, Proc. EUROSENSORS X, Vol. 1, p. 227 (Leuven, Belgium, Sept. 9–12, 1996). Sensors and Actuators A, Vol. 60, pp. 235–239, 1997.
2. Mathematical modelling of a porous silicon-based pellistor-type catalytic flammable gas sensor;Kolev;Microelectronics Journal,1998
3. Zs. VÍzváry, M. Ádám, I. Bársony, Geometric considerations in micromachined capacitive pressure sensors, Workshop on MicroDevices, Budapest, Hungary, May 1999.
4. MEMS Material Database:http://mems.isi.edu/mems/materials/materials.cgi
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献