Deposition and characterization of sputtered ZnO films
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science
Reference7 articles.
1. Deposition of zinc oxide thin films for application in bulk acoustic wave resonator
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4. Design and Analysis of Experiments;Montgomery,1997
5. Postdeposition annealing of radio frequency magnetron sputtered ZnO films
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